The Brooks GF Series is designed for long-term reliability with embedded diagnostics and automated zeroing to reduce maintenance for a lower cost of ownership. Standard Features include:

• High purity construction with reduced surface area and removal of unswept volumes for faster dry-down during purge
• Surface passivated high purity wetted flow path
• 10 μ inch Ra surface finish
• Independent service and diagnostic port for on-tool troubleshooting and process fingerprinting and optimization
• Integrated high visibility LCD display reports flow (%) and temperature (°C)
• Analog and Serial (RS-485), analog 0–5 VDC and DeviceNet™ communication interfaces
• Gas and range user configurable
• Multi gas/multi range model created and proven using actual process gases to ensure real world accuracy
• Change full scale flow range up to 3:1 for optimum process and inventory management flexibility
• Select from hundreds of gases and gas mixtures