Brand:
Thermal, Analog, Gas
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Analog Thermal Mass Flow Controller, UHP
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5964
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The Brooks Model 5964 Ultra-High Purity (UHP) metal sealed mass flow controller offers state-of-the-art performance in gas flow measurement and control. It combines the outstanding leak integrity of metal seals, ultra-clean internal surface finish (5 Ra avg) for particulate-free delivery and enhanced response for rapid process applications.
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Brand :
BROOKS
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Thermal Mass Flow, Semiconductor
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5965
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The Brooks Instrument Semiconductor line of thermal mass flow and pressure instruments is designed to meet the rigorous demands of our customers’ established and newly developing process applications. Availability of either analog or digital based technologies ensures the right fit for the application. Model 5965 is thermal, analog, gas.
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Brand :
BROOKS
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Thermal Mass Flow Controller, 3 - 30,000 sccm, Metal Seals
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5850EM
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The Brooks Model 5850EM metal sealed mass flow controller accurately measures and controls gas flows in ultraclean environments of 3 - 30,000 sccm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
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Brand :
BROOKS
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Thermal Mass Flow Controller, 10 - 100 slpm, Metal Seals
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5851EM
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The Brooks Model 5851EM metal sealed mass flow controller accurately measures and controls gas flows in ultra-clean environments of 10 - 100 slmp (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
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Brand :
BROOKS
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Analog Thermal Mass Flow Controller, 3 - 30,000 sccm, Elastomer Seals
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5850E
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The Brooks Model 5850E elastomer sealed analog mass flow controller accurately measures and controls gas flows of 3 - 30,000 sccm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
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Brand :
BROOKS
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Analog Thermal Mass Flow Controller, 10 - 100 slpm, Elastomer Seals
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5851E
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The Brooks Model 5851E elastomer sealed analog mass flow controller accurately measures and controls gas flows of 10 - 100 slpm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
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Brand :
BROOKS
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Analog Thermal Mass Flow Controller, 100 - 1,000 slpm, Elastomer Seals
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5853E
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The Brooks Model 5853E elastomer sealed analog mass flow controller accurately measures and controls gas flows of 100 - 1,000 slpm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
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Brand :
BROOKS
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Analog Thermal Mass Flow Meter, 3 - 30,000 sccm, Elastomer Seals
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5860E
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The Brooks Model 5860E elastomer sealed analog mass flow meter accurately measures gas flows of 3 - 30,000 sccm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
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Brand :
BROOKS
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Analog Thermal Mass Flow Meter, 10 - 100 slpm, Elastomer Seals
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5861E
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The Brooks Model 5861E elastomer sealed analog mass flow meter accurately measures gas flows of 10 - 100 slpm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
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Brand :
BROOKS
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Analog Thermal Mass Flow Meter, 100 - 1,000 slpm, Elastomer Seals
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5863E
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The Brooks Model 5863E elastomer sealed analog mass flow meter accurately measures gas flows of 100 - 1,000 slpm (Nitrogen). Brooks’ extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
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Brand :
BROOKS
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