Brooks' LF200 Series liquid flow controllers exceed the needs of your most demanding chemical mechanical planarization and wet chemical processes. Proprietary conical ultrasonic sensor and signal processing algorithms provide highly accurate and repeatable flows. A straight flow path, non-intrusive ultrasonic sensor prevents detrimental impact on delivered fluids (agglomeration of slurry and breakdown of sensitive chemicals due to shear force). Brooks' unique software takes into account the dual phase nature of slurry and manages anomalies, including bubbles. Both needle and pinch valve options are available.