Apycom jQuery Menus 宇泰科技 Uni-Istrament Taiwan Technology Company.
DC Power Supply for Magnetron Sputtering
EnerStream 10KW / 15KW / 20KW

   
Brand : EN Technology

 

 Features
 
 Highly Reliable Arc Control
- Lowest Arc Energy(Less than 0.5mJ/kW)
- Superior control features of rapid changing impedance
- Lower output ripple and stored energy
 
 Excellent Performance
- Wider operating range(Full output power within 4:1 Impedance range)
- Easy paraller operation(Up to 160kW)
- Lower output ripple and stored energy
 
 High Reliability
- very stable topology with drooping characteristics
- 32bit DSP enables high speed and precision control
- Lower interference and noise
- Higher endurance for Sag(SEMI F47)
 
 Benefits
 
- Allows easy system and process integration
- User friendly operation
- Increases production yields
- Lower cost of ownership
 
 Applications
 
- Semiconductor
- Flat Panel Display(LCD, OLED, etc)
- Industrial Coating(EMI, Headlamp, FCCL, etc)

 

 

 Specifications
Items
EnerStream 10 EnerStream 15 EnerStream 20
Input voltage
Output Power
Output voltage
Output current
Regulation
Control Mode
Arc Energy
Arc Control
Temperature
Cooling
Size(mm)
Weight(kg)

 

 


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