Features

Excellent Performance

- Wider operating range - Parallel operation and Synchronous Pulsing - Adjustable frequency(20~150kHz) - Variable pulse width

High Reliability

- Very stable topology - 32bit DSP enables high speed and precision control - Higher endurance for Sag(SEMI F47) - Lower interference and noise - Lower output ripple and system energy

Highly Reliable Arc Control

- Lowest Arc Energy (Less than 1mJ/kW) - Superior control features of rapid changing impedance - Lower output ripple and stored energy

Benefits

- Allows easy system and process integration - User friendly operation - Increases production yields - Lower cost of ownership

Applications

- PECVD process - Pulse Bias

Specifications

Items EnerPulse 5 EnerPulse 10 Input voltage 3Φ, 220/380Vac, 50-60Hz Output Power 5kW 10kW Output voltage 800V Output current 12.5A 25A Regulation Voltage/ Power / Current Waveform Asymmetric bi-polar Frequency 20 ~ 150kHz (option: up to 300kHz) Reverse Voltage 10% of Negative output voltage Reverse Time DC mode, 1.5 ~ 7us Pulse Power(at 80% duty) 6.25A(1000V) ~ 12.5A(500V) 12.5A(1000V) ~ 25A(500V) Control Mode Host, Remote, Local Arc Energy Less than 1mJ/ kW Temperature + 5℃ ~ + 40℃ Cooling Forced Air Size(mm) 133(H) X 483(W) X 600(D) Weight(kg) 26.5 29.5