 Features |
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 Excellent Performance |
- Quasi-Pulse
- Wider operating range
- Parallel operation
- Adjustable frequency (20~ 60kHz)
- Variable pulse width
- High reactive-power capability
- Optimum drooping characteristics well-matched with Arc Jet type |
| |
| High Reliability |
- Very stable topology
- 32bit DSP enables high speed and precision control
- Higher endurance for input voltage Sag phenomenon
- Lower interference and noise
- Lower output ripple and system energy |
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| Benefits |
| |
- Allows easy system and process integration
- User friendly operation
- Increases production yields
- Lower cost of ownership
- Forced Air Cooling
- Customized |
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| Applications |
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- Surface Cleaning
- Surface Activation
- PR Ashing
- Dry Etching |