Brand:
サーマル デジタル エラストマー、ガス
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2.2.1. サーマル マス フロー メーター/ コントローラー, エラストマー、シール
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SLA5800
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Brooks SLA5800 Series elastomer sealed digital thermal mass flow measurement and control products offer unparalleled flexibility and performance. They offer faster response, better accuracy and improved control over traditional analog devices. Industry leading repeatability ensures a stable process even under changing conditions. Self diagnostics and alarms eliminate downtime. These devices are globally approved for use in a variety of service areas
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Brand :
BROOKS
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2.2.2. サーマル マス フロー メーター/ コントローラー, エラストマー、シール
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5800S
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The Brooks Model 5800S elastomer sealed digital flow controller expands the capability and functionality of Brooks’ Smart Mass Flow Products. Brooks’ proprietary Adaptive Valve Control makes these products virtually insensitive to process interference, ensuring unparalleled performance and fast control, even under varying process conditions. Models available with analog or digital I/O.
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Brand :
BROOKS
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2.2.3. Brooks 4800 シリーズ
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4800 シリーズ
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The Brooks 4800 Series of mass flow meters and mass flow controllers is an excellent choice for measurement and control of many common gases. It offers a broad flow range, fast response time, compact size, and many other benefits for a variety of applications. The 4800 Series utilizes a Micro Electric Mechanical (MEMS) based thermal sensor that achieves extremely fast response times. It is ideally suited for OEMs. The optional Local Operator Interface provides a convenient user interface to view, control, and configure the 4800 Series devices.
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Brand :
BROOKS
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