Brand:
圧力 コントローラー
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5.1.1 デジタル サーマル 圧力 コントローラー, 1-1/8”、プラットフォーム、
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SLA7810/20 シリーズ
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Brooks® SLA7810/20 Series metal sealed digital pressure measurement and control products offer unparalleled flexibility and performance, and are designed to meet the latest 1-1/8” platform. The SLA7800 Series family of pressure controllers is the most accurate, repeatable, and responsive available. Brooks’ new, improved metal seal valve provides better control because it is designed to be more forgiving to process changes
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Brand :
BROOKS
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5.1.2. デジタル サーマル 圧力 コントローラー, エラストマー シール
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SLA5800 エラストマー シール
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Electronic pressure controllers are flexible devices for manipulating the pressure of gas or liquid upstream or downstream of the device. Brooks electronic pressure controllers utilize the core control technology present in our industry leading thermal mass flow controllers.
Brooks replaces the thermal mass flow sensor with an integral pressure sensor. Industry leading control valve technology and software then control the pressure of a fluid based on an setpoint signal to the device. Using a closed loop control, Brooks pressure controllers do not have the drop associated with traditional mechanical spring diaphragm pressure regulators. Brooks pressure controllers are available with internal pressure sensors to control pressure in a range from torr to 4500 psig.
Brooks pressure controllers can be configured to use external pressure sensors for added flexibility. When using an external pressure sensor the flow of the gas required to maintain pressure can be monitored.
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Brand :
BROOKS
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5.1.3. デジタル
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SLA5840
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Electronic pressure controllers are flexible devices for manipulating the pressure of gas or liquid upstream or downstream of the device. Brooks electronic pressure controllers utilize the core control technology present in our industry leading thermal mass flow controllers.
Brooks replaces the thermal mass flow sensor with an integral pressure sensor. Industry leading control valve technology and software then control the pressure of a fluid based on an setpoint signal to the device. Using a closed loop control, Brooks pressure controllers do not have the drop associated with traditional mechanical spring diaphragm pressure regulators. Brooks pressure controllers are available with internal pressure sensors to control pressure in a range from torr to 4500 psig.
Brooks pressure controllers can be configured to use external pressure sensors for added flexibility. When using an external pressure sensor the flow of the gas required to maintain pressure can be monitored.
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Brand :
BROOKS
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5.1.4. サーマル マス フロー 半導体
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5866E
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The Brooks Instrument Semiconductor line (5866E) of thermal mass flow and pressure instruments is designed to meet the rigorous demands of our customers’ established and newly developing process applications. Availability of either analog or digital based technologies ensures the right fit for the application.
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Brand :
BROOKS
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5.1.5. サーマル マス 圧力、コントローラー、金属シール
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5866M
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Brooks® Model 5866M metal seal pressure controllers accurately measure and control upstream or downstream pressure. The heart of the system is a solid state pressure transducer which produces an electrical output proportional to pressure. This signal is used to operate the integral control valve and to provide an output signal.
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Brand :
BROOKS
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