Brooks’ digital thermal mass flow controllers and meters, with over 150,000 installed around the world, offer faster response, better accuracy, and improved control over analog devices. The Smart Link Advantage (SLA) Series is Brooks’ premier smart digital thermal mass flow series. SLA mass flow controllers and mass flow meters link to advanced service tools and offer the advantage of digital protocols. The SLA Series provides many advanced features such as enhanced temperature stability, zero drift diagnostics, Coplanar Valve for improved turndown, and more.

Benefits of Brooks thermal mass flow meters and mass flow controllers include:

• Industry leading repeatability ensures a stable process even under changing conditions
• Self diagnostics and alarms eliminate downtime
• Multiple communication protocols allow easy integration into many control systems
• Elastomer seal option provides exceptional leak integrity and maximizes control valve shutoff dependability
• Ultra-high purity (UHP) and metal seal options ensure clean flow paths for contamination sensitive processes