Feature

Superior Performance

• Microprocessor Control
• High efficiency SMPS(Switching Mode Power Supply)
• Class-E RF Amplifier Topology.
• Stable & Reliable RF Output Power

High Reliability

• Stable topology & Intensive RF Filter.
• Lower interface and noise.
• High quality parts and SMPS operation.
• High efficient class E switching-mode design.
• Less generator heating & reducing temperature stress on critical component.

Benefit

• High power density.
• Increased Process Uptime.
• High accurancy at full output power range.
• Increase production yields.
• Simplified process integration.
• Lower cost ownership

Typical Application

Market Application

• Semiconductor
• Flat Panel Display,OLED,Solar

Process Application

• Etching:Silicon,dielectric,metal and strip
• Depositon:PECVD,MOCVD,PVD,PEALD
• Industrial:SiO2,TiN Sputtering,Plasma Treatment